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Recent advances in micro- and nano-machining technologies

Shang GAO, Han HUANG

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 1, Pages 18-32 doi: 10.1007/s11465-017-0410-9

Abstract:

Device miniaturization is an emerging advanced technology in the 21st century. The miniaturization of devices in different fields requires production of micro- and nano-scale components. The features of these components range from the sub-micron to a few hundred microns with high tolerance to many engineering materials. These fields mainly include optics, electronics, medicine, bio-technology, communications, and avionics. This paper reviewed the recent advances in micro- and nano-machining technologies, including micro-cutting, micro-electrical-discharge machining, laser micro-machining, and focused ion beam machining. The four machining technologies were also compared in terms of machining efficiency, workpiece materials being machined, minimum feature size, maximum aspect ratio, and surface finish.

Keywords： micro machining cutting electro discharge machining (EDM) laser machining focused ion beam (FIB)